Microcalorimeter Energy Dispersive X-Ray Spectroscopy in Routine Semiconductor Failure Analysis

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2002, Pages 87-92

  Simmnacher, B ^a   Weiland, R ^a   Langer, E ^b   Buhler M ^c   Hohne J ^c   Hollerith, C ^d  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b ADVANCED MICRO DEVICES   (United States)

^c Vericold Technologies GmbH   (Germany)

^d Technische Unversität   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETERS; DEMAGNETIZATION; ENERGY DISPERSIVE SPECTROSCOPY; FAILURE ANALYSIS; ION BEAMS; PHASE TRANSITIONS; SQUIDS; SUPERCONDUCTING DEVICES; THIN FILMS; WAVELENGTH DISPERSIVE SPECTROSCOPY;

ENERGY RESOLUTION; MICROCALORIMETERS;

SEMICONDUCTOR DEVICES;

EID: 1542330272     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. The International Technology Roadmap for Semiconductors, Semiconductor Industry Association 2001
2. High Resolution X-Ray Spectroscopy using Iridium/Gold Phase Transition Thermometers J. Höhne, M. Altmann, G. Angloher, P. Hettl, J. Jochum, T. Nüßle, S. Pfnür, J. Schnagl, M.L. Sarsa, S. Wänninger, F. v. Feilitzsch, Proceedings of the European Conference on Energy Dispersive X-ray Spectrometry 1998 EDXRS-98, edited by J. E. Fernandez and A. Tartari, ISBN 88-7794-195-2, pp. 77-80
3. High-resolution, energy-dispersive microcalorimeter spectrometer for x-ray microanalysis D.A. Wollman, K.D. Irwin, G.C. Hilton, L.L. Dulcie, D.A. Newbury, J.M. Martinis, J. Microscopy, 188, 196-223 (1997).
4. Microcalorimeter Energy Dispersive X-ray Spectrometer for Low Voltage Microanalysis D.A. Wollman, J.M. Martinis, S.W. Nam, G.C. Hilton, K.D. Irwin, D.A. Rudman, N.F. Bergren, S. Deiker, M.E. Huber, D.E. Newbury, Elec. Dev. Fail. Anal. News, Vol. 2(4), pp. 1 (2000)
5. Cryogenic Detector Systems for Materials Analysis J. Höhne, U. Hess, M. Bühler, F. v. Feilitzsch, J. Jochum, R. v. Hentig, T. Hertrich, C. Hollerith, M. Huber, J. Nicolosi, K. Phelan, D. Redfern, B. Simmnacher, R. Weiland, D. Wernicke Ninth International Workshop on Low Temperature Detectors (LTD9): Edited by F. Scott Porter, Dan McCammon, Massimiliano Galeazzi and Caroline K. Stahle, AIP Conference Proceedings, 605, pp. 353 (2002)
6. The Microcalorimeter for Industrial Applications D. Redfern, J. Nicolosi, J. Höhne, R. Weiland, B. Simmnacher and C. Hollerith, NIST-MAS Workshop (to be published).