A novel technique for making self-encapsulated and self-aligned copper films

Materials Science and Engineering: B

Volumn 103, Issue 1, 2003, Pages 45-48

  Chugh, Amit ^a   Tiwari, Ashutosh ^a   Kvit, A ^a   Narayan, J ^a  

^a North Carolina State University   (United States)

Author keywords

Annealing; Domain matching epitaxy; Pulsed laser ablation; Self aligned passivated contacts; Transmission electron microscopy

Indexed keywords

ANNEALING; COPPER; EPITAXIAL GROWTH; MAGNESIUM COMPOUNDS; OXYGEN; PULSED LASER DEPOSITION; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

COPPER FILMS;

METALLIC FILMS;

EID: 0042623431     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(03)00148-X     Document Type: Article

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