Measurement of the nanometre deformation field in metallic microbars with microscopical ESPI

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3098, Issue , 1997, Pages 400-410

  Aebischer, Hubert A ^a   Mazza, Edoardo ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

deformation field; displacement field; Gaussian low pass filter; micromaterial; microsample; Microscopical ESPI (electronic speckle pattern interferometry); nanometre; phase shifting technique; strain field

Indexed keywords

DEFORMATION FIELD; DISPLACEMENT FIELD; ESPI (ELECTRONIC SPECKLE PATTERN INTERFEROMETRY); GAUSSIANS; MICROMATERIAL; MICROSAMPLE; NANOMETRES; PHASE-SHIFTING TECHNIQUE; STRAIN FIELD;

FINITE ELEMENT METHOD; HOLOGRAPHIC INTERFEROMETRY; LOW PASS FILTERS; MECHANICAL PROPERTIES; OPTICAL TESTING; SIGNAL FILTERING AND PREDICTION; SPECKLE; TEMPLATE MATCHING;

DEFORMATION;

EID: 0042533872     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.281185     Document Type: Conference Paper

References (18)

1. W. Ehrfeld and H. Lehr, "Deep x-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics", Radiation Physics and Chemistry 45, 3, pp. 349-365, 1995.
2. W. D. Nix, D .B. Noble, and J. F. Turlo "Mechanism and kinetics of misfit dislocation formation in heteroepitaxial thin films", Materials Research Society Symp. Proc. 188, pp. 315-330, Pennsylvania, 1990.
3. P. E. Arzt, J. Sanchez, and W. D. Nix, "Mechanische Festigkeit von dünnen Schichten als Grundlage für Werkstoffe der Mikrotechnik", VDI Berichte 933, pp. 163-178, 1991.
4. L. Kiesewetter, D. Houdeau, G. Löper, and J. M. Zhang, "Wie belastbar ist Silizium in mikromechanischen Strukturen?", Mikromechanik und integrierte Optik, F&M 100, 6, pp. 249-254, 1992.
5. K. Najafi and K. Suzuki, "A novel technique and structure for the measurement of intrinsic stress and Young's modulus of thin film", Proc. IEEE Micro Electro Mechanical Systems, pp. 96-97, Salt Lake City, Utah, Feb. 20-22, 1989.
6. O. Tabata, K. Kawahata, S. Sugiyama, and I. Igarashi, "Mechanical property measurements of thin films using load-deflection of composite rectangular membranes" , Sensors and Actuators 20, pp. 1 35-141, 1989.
7. Y. C. Tai and R. S. Muller, "Fracture strain of LPCVD polysilicon", Technical Digest, IEEE Solid State Sensor and Actuator Workshop, pp. 88-91, South Carolina, June 6-9, 1988.
8. E. Mazza, G. Danuser, and J. Dual, "Light optical deformation measurements in microbars with nanometer resolution", Microsystem Technologies 2, pp. 83-91, 1996.
9. E. Mazza, S. Abel, and J. Dual, "Experimental determination of mechanical properties of Ni and Ni-Fe microbars", Microsystem Technologies 2, pp. 197-202, 1996.
10. A. E. Ennos, "Speckle interferometry", Laser speckle and related phenomena, topics in applied physics 9, J. C. Dainty (ed), pp. 203-253, Springer-Verlag, Berlin, 1984.
11. R. S. Sirohi, "Speckle methods in experimental mechanics", Speckle metrology, R. S. Sirohi (ed), pp. 99-155, Marcel Dekker Inc., New York, 1993.
12. T. Floureux, "Improvement of electronic speckle fringes by addition of incremental images", Optics & Laser Technology 25, 4, pp. 255-258, 1993.
13. M. Hertwig, T. Flemming, T. Floureux, and H. A. Aebischer, "Speckle interferometric daniage investigation of fibre-reinforced composites", Optics and Lasers in Engineering 24, pp. 485-504, 1996.
14. J. W.Goodman, Introduction to Fourier optics, McGraw-Hill, New York, 1988.
15. K. R. Castleman, Digital image processing, Prentice Hall, Englewood Cliffs N. J., 1996.
16. K. Creath, "Phase-shifting speckle interferometry", Applied Optics 24, pp. 3053-3058, 1985.
17. M. H. Schultz, Spline analysis, Prentice Hall, Englewood Cliffs N. J., 1966.
18. G. Danuser and E. Mazza, "Observing deformations of 20 nanometer with a low numerical aperture light microscope", Optical Inspection and Micromeasurements, SPIE 2782, pp. 180-191, 1996.