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Microsystem Technologies

Volumn 2, Issue 1, 1995, Pages 83-91

Light optical deformation measurements in microbars with nanometer resolution

(3) Mazza, E a Danuser, G a Dual, J a

a ETH ZURICH (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 51649135650 PISSN: 09467076 EISSN: 14321858 Source Type: Journal
DOI: 10.1007/BF02739536 Document Type: Article

Times cited : (8)

References (19)

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- Gruen, A.¹

8
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- Mikromechanik und integrierte Optik, München
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- Kieswetter, L.¹ Houdeau, D.² Löper, G.³ Zhang, J.M.⁴

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- Microtensile test of free-standing polysilicon fibers of various grain sizes
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- Video microscope with submicrometer resolution
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- Mechanical properties of nanometer volumes of material: use of small area indentation
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- A comparison of some techniques for the sub-pixel location of discrete target images
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.