Development of a compact and precise ion irradiation system

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 210, Issue , 2003, Pages 37-41

  Iida, Toshiyuki ^a   Sato, Fuminobu ^a   Tanaka, Teruya ^a   Naito, Masao ^b  

^a OSAKA UNIVERSITY   (Japan)

^b NISSIN ION EQUIPMENT CO LTD   (Japan)

Author keywords

Beam characteristics; Compact ion irradiation system; Ion beam; Single ion

Indexed keywords

FOCUSING; HIGH ENERGY PHYSICS; ION BOMBARDMENT; OPTICAL INSTRUMENT LENSES; PARTICLE ACCELERATORS; PARTICLE DETECTORS; PARTICLE OPTICS; PLASMA DIAGNOSTICS;

DEFLECTORS; ION IRRADIATIONS;

ION BEAMS;

EID: 0042514801     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)01000-0     Document Type: Conference Paper

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