Proton beam micromachining: Electron emission from SU-8 resist during ion beam irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 154-159

  Bettiol, A A ^a   Rajta, I ^a   Teo, E J ^a   Van Kan, J A ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Electron emission; Proton beam micromachining; SU 8

Indexed keywords

ELECTRON EMISSION; IRRADIATION; LITHOGRAPHY; MICROMACHINING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPIN COATING;

PROTON BEAM MICROMACHINING (PBM);

PROTON BEAMS;

EID: 0036568956     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01276-9     Document Type: Conference Paper

References (7)

1. Nickel and copper electroplating of proton beam micromachined SU-8 resist
2. Particle induced electron emission II