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Volumn 42, Issue 13, 2003, Pages 2341-2345

Angstrom–range optical path–length measurement with a high–speed scanning heterodyne optical interferometer

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL RESOLVING POWER; REFRACTIVE INDEX; SCANNING; THICKNESS MEASUREMENT;

EID: 0042472783     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.002341     Document Type: Article
Times cited : (22)

References (12)
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  • 2
    • 0004129997 scopus 로고
    • of Springer Series in Optical Sciences (Springer, New York
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    • (1994) Holographic Interferometry , vol.68
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  • 4
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    • Dandliker, R.1
  • 5
    • 0033283763 scopus 로고    scopus 로고
    • Very large scale phase measuring interferometry for profile measurement of aspheric surfaces with nanometer accuracy
    • IEEE, New York
    • S. Kim, I. Chang, D. Kim, T. Kim, and S. Yoo, “Very large scale phase measuring interferometry for profile measurement of aspheric surfaces with nanometer accuracy,” in The Pacific Rim Conference on Lasers and Electro-Optics (IEEE, New York, 1999), pp. 70-71.
    • (1999) The Pacific Rim Conference on Lasers and Electro-Optics , pp. 70-71
    • Kim, S.1    Chang, I.2    Kim, D.3    Kim, T.4    Yoo, S.5
  • 6
    • 0034579217 scopus 로고    scopus 로고
    • Optical scanning interferometer for dynamic imaging of high-frequency surface motion
    • 2000, IEEE, New York
    • J. E. Greaber, “Optical scanning interferometer for dynamic imaging of high-frequency surface motion,” in Ultrasonics Symposium, 2000 (IEEE, New York, 2000), pp. 733-736.
    • (2000) Ultrasonics Symposium , pp. 733-736
    • Greaber, J.E.1
  • 7
    • 0036683830 scopus 로고    scopus 로고
    • Digital Hilbert transform for separation measurement of thickness and refractive indices of layered objects by use of a wavelength-scanning heterodyne interference confocal microscopes
    • Y. Watanable and I. Yamaguchi, “Digital Hilbert transform for separation measurement of thickness and refractive indices of layered objects by use of a wavelength-scanning heterodyne interference confocal microscopes,” App. Opt. 41, 4497-4502 (2002).
    • (2002) App. Opt. , vol.41 , pp. 4497-4502
    • Watanable, Y.1    Yamaguchi, I.2
  • 8
    • 0000256332 scopus 로고    scopus 로고
    • Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope
    • T. Fukano and I. Yamaguchi, “Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope,” Appl. Opt. 38, 4065-4073 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 4065-4073
    • Fukano, T.1    Yamaguchi, I.2
  • 9
    • 0011057428 scopus 로고    scopus 로고
    • Scanning heterodyne optical interferometer
    • N. A. Riza, “Scanning heterodyne optical interferometer,” Rev. Sci. Instrum. 67, 2466-2476 (1997).
    • (1997) Rev. Sci. Instrum. , vol.67 , pp. 2466-2476
    • Riza, N.A.1
  • 11
    • 0043218947 scopus 로고    scopus 로고
    • Sub-micron range thickness measurements using a novel scanning heterodyne optical interferometer
    • IEEE, New York
    • N. A. Riza and M. A. Arain, “Sub-micron range thickness measurements using a novel scanning heterodyne optical interferometer,” Proceedings of IEEE Sensors 2002 (IEEE, New York, 2002), Vol. 2, pp. 1080-1084.
    • (2002) Proceedings of IEEE Sensors 2002 , vol.2 , pp. 1080-1084
    • Riza, N.A.1    Arain, M.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.