Sub-Micron Range Thickness Measurements Using a Novel Scanning Heterodyne Optical Interferometer

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1080-1084

  Riza, Nabeel A ^a   Arain, Muzammil A ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Heterodyne optical interferometers and Acousto optic devices; Submicron thickness measurements

Indexed keywords

HETERODYNE OPTICAL INTERFEROMETERS; SUBMICRON THICKNESS MEASUREMENTS;

ACOUSTOOPTICAL DEVICES; GALVANOMETERS; HETERODYNING; INTERFEROMETERS; LASER BEAMS; OPTICAL RESOLVING POWER; SCANNING;

OPTICAL DEVICES;

EID: 0043218947     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Riza, N.A., "Scanning Heterodyne Optical Interferometer," Rev. Sci. Instrum. 67 (7), July 1996.
2. Riza, N.A., "Scanning Heterodyne acousto-optical Interferometers," US Patent 5694216, Dec 2, 1997.
3. Yariv, Amnon, "Optical Waves in Crystals," Addison-Wesley, San Francisco, CA (1984).