UHV/CVD growth of Co on Si(0 0 1) using cobalt carbonyl

Applied Surface Science

Volumn 219, Issue 1-2, 2003, Pages 136-142

  Zhao, Q ^a   Greve, D W ^a   Barmak, K ^b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Cobalt; Sticking coefficient; Thermal desorption

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COBALT; COBALT COMPOUNDS; DESORPTION; GRAIN GROWTH; HIGH TEMPERATURE EFFECTS; MASS SPECTROMETRY; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SURFACE REACTIONS; X RAY DIFFRACTION ANALYSIS;

STICKING COEFFICIENTS;

CRYSTAL GROWTH;

EID: 0042363341     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00597-X     Document Type: Conference Paper

References (18)

1. Lawrence M., Dass A., Fraser D.B., Wei C.-S. Appl. Phys. Lett. 58:1991;1308.
2. Kim G.B., Kwak S.J., Baik H.K., Lee S.M. J. Appl. Phys. 82:1997;2323.
3. Scherony M.J., Sriram T.S., England C., Pelillo A., Harris W.C., Miller S.J., Bill S.A., Yang T.Y., Wei A., Antoniadis D.A. Mater. Res. Soc. Symp. Symp. Proc. 404:1996;209.
4. Alberti A., Kappius L., Mantl S. Microelect. Eng. 55:2001;151.
5. S.P. Murarka, Silicides for VLSI Applications, Academic Press, New York, 1983.
6. Sarkar D.K., Rau I., Falke M., Giesler H., Teichert S., Beddies G., Hinneberg H.-J. Appl. Phys. Lett. 78:2001;3604.
7. Porod W., Lent C.S., Berstein G.H., Orlov A.O., Amlani I., Snider G.L., Merz J.L. Int. J. Elect. 865:1999;549.
8. West G.A., Beeson K.W. Appl. Phys. Lett. 53:1988;740.
9. Rhee H.S., Ahn B.T. Appl. Phys. Lett. 74:1999;3176.
10. Gross M.E., Schnoeskranz K., Brasen D., Luftman H. J. Vac. Sci. Technol. B. 6:1988;1548.
11. Maruyama T., Nakai T. Appl. Phys. Lett. 59:1991;1433.
12. Rhee H.S., Ahn B.T. J. Electrochem. Soc. 146:1999;2720.
13. M. Boudart, G. Djéga-Mariadassou, Kinetics of Heterogeneous Catalytic Reactions, Princeton University Press, Princeton, NJ, 1984.
14. Ertl G., Neumann M., Streit K.M. Surf. Sci. 64:1977;393.
15. McCabe R.W., Schmidt L.D. Surf. Sci. 66:1977;101.
16. Greve D.W. Mater. Sci. Eng. B. 18:1993;22.
17. D.W. Greve, in: Proceedings of the Symposium on Common Themes and Mechanisms of Epitaxial Growth, Materials Research Society, Pittsburgh, PA, 1993, pp. 237-242.
18. Q. Zhao, D.W. Greve, K. Barmak, J. Vac. Technol., unpublished.