Resonating cantilever mass sensor with mechanical on-plane excitation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 I, Issue , 2003, Pages 353-363

  Teva, J ^a   Abadal, G ^a   Jorda X ^b   Borrise X ^b   Davis, Z ^c   Barniol, N ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

H bridge power circuit; Mass sensor; MEMS; MEMS dynamic simulation; NEMS; On plane excitation; Resonant cantilever; Shear mode piezoelectric

Indexed keywords

CANTILEVER BEAMS; CAPACITANCE; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTRODES; ELECTROSTATICS; OSCILLATIONS; PIEZOELECTRIC TRANSDUCERS; RESONANCE; SENSORS;

ATTO-GRAM SCALE; CANTILEVER DRIVER STRUCTURE; MASS SENSOR; ON-PLANE OSCILLATING CANTILEVER; PARASITIC CAPACITANCE;

MICROELECTROMECHANICAL DEVICES;

EID: 0042329536     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.501339     Document Type: Conference Paper

References (9)

1. Z.J.Davis, G.Abadal, B.Helbo, O.Hansen, F.Campabadal, F.Pérez-Murano, J.Esteve, E.Figueras, R.Ruiz, N.Barniol, A.Boisen. Transducers'01 Conference Technical Digest, pp72-75 (2001).
2. Z.J.Davis, G.Abadal, O.Kuhn, O.Hansen, F.Gren and A.Boisen. Fabrication and characterisation of nanoresonating devices for mass detection. J.Vac.Sci.Tecnol. B 18 (2), pp 612-616 (mar/apr 2000).
3. G.Abadal, Z.J.Davis, B.Helbo, A.Boisen, R.Ruiz, F.Pérez-Murano, N.Barniol, F.Campabadal, J.Esteve, E.Figueras. "Electromechanical Model of a resonating Nano-Cantilever Based Sensor for mass detection in the attogram scale". Nanotechnology 12, 2001 pp 100-104.
4. J.Verd, M.Villaroya, G.Abadal, F.Pérez-Murano, N.Barniol, "CMOS circuitry for on-chip read-out of a high sensitivity mass detection". XVII Conference On Design Of Circuits And Integrated Systems 2002. Santander (Spain) November 2002, pp.207-212.
5. http://www.uab.es/nanomass/
6. J.Teva, G.Abadal, F.Pérez-Murano, X.Borrisé, J.Verd, M.Villaroya, N.Barniol "NEMS simulation: a resonating nano-scale cantilever as a mass sensor". Conferencia Dispositivos Electronicos 2003. Calella (Spain) February 2003.
7. J.Verd, G.Abadal, X.Borrise, M.Villaroya, Z.Davis, A.Boisen, F.Campabadal, E.Figueras, J.Esteve, j.:monserrat, F.Pérez-Murano, N.Barniol. "Electrical characterization of a resonating nano-cantilever" Conferencia Dispositivos Electronicos 2003. Calella (Spain) February 2003.
8. http://www.steveleyntd.com/
9. Lawrence H. Van Vlack, "Elements of materials science and engineering", Addison-Wesley, 1996, ISBN: 0201512599.