Monolithical integration of polymer based microfluidic structures on application specific integrated circuits

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 II, Issue , 2003, Pages 782-789

  Chemnitz, Steffen ^a   Schäfer, Heiko ^a   Schumacher, Stephanie ^a   Koziy, Volodymyr ^a   Fischer, Alexander ^a   Meixner, Alfred J ^a   Ehrhardt, Dietmar ^a   Böhm, Markus ^a  

^a UNIVERSITY OF SIEGEN   (Germany)

Author keywords

ASIC; Micro pump; Microfluidics; Polymer

Indexed keywords

ADHESION; ELECTRODES; ELECTROPHORESIS; GOLD; METALLIZING; SEMICONDUCTING GLASS; SEMICONDUCTING POLYMERS; SEMICONDUCTOR DEVICE MANUFACTURE;

ELECTROKINETIC MICROPUMPS; MICROCHIP; MICROFLUIDIC STRUCTURES; OXYGEN PLASMA;

APPLICATION SPECIFIC INTEGRATED CIRCUITS;

EID: 0042329295     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.498994     Document Type: Conference Paper

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