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Volumn 67, Issue 7-8, 2000, Pages 334-342
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Future Requirements on Micro- and Nanomeasurement Technique - Challenges and Approaches;Anforderungen an die zukünftige Mikro- und Nanomesstechnik - Herausforderungen und Vorgehensweisen
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Author keywords
[No Author keywords available]
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Indexed keywords
APPLICATION FIELDS;
COMMUNICATION TECHNOLOGIES;
MASS PRODUCTION;
MEASURING EQUIPMENTS;
MEASURING TECHNOLOGY;
MICRO SYSTEMS TECHNOLOGIES;
PRODUCTION PROCESS;
ULTRA PRECISION;
AUTOMOTIVE INDUSTRY;
INSTRUMENTS;
MEASUREMENT;
PRODUCTION ENGINEERING;
MANUFACTURE;
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EID: 0042260704
PISSN: 01718096
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (6)
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References (16)
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