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Volumn 67, Issue 7-8, 2000, Pages 334-342

Future Requirements on Micro- and Nanomeasurement Technique - Challenges and Approaches;Anforderungen an die zukünftige Mikro- und Nanomesstechnik - Herausforderungen und Vorgehensweisen

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION FIELDS; COMMUNICATION TECHNOLOGIES; MASS PRODUCTION; MEASURING EQUIPMENTS; MEASURING TECHNOLOGY; MICRO SYSTEMS TECHNOLOGIES; PRODUCTION PROCESS; ULTRA PRECISION;

EID: 0042260704     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (6)

References (16)
  • 7
    • 4444238712 scopus 로고    scopus 로고
    • Metrology at Nanometer Level
    • Narayanasamy, K.; Srinivasa, Y. G. (Ed.)
    • Whitehouse, D. J.: Metrology at Nanometer Level. In: Narayanasamy, K.; Srinivasa, Y. G. (Ed.): Precision Engineering. (2000).
    • (2000) Precision Engineering
    • Whitehouse, D.J.1
  • 8
    • 0003408831 scopus 로고
    • Ultimate Limits Fabrication and Measurement
    • Kluwer Academic Publishers, ISBN: 079233504X
    • Welland M.: Ultimate Limits Fabrication and Measurement. Kluwer Academic Publishers, NATO ASI Series 1995, ISBN: 079233504X.
    • (1995) NATO ASI Series
    • Welland, M.1
  • 9
    • 0042802372 scopus 로고    scopus 로고
    • Geometrical measurements in precision engineering - Challenges and approaches
    • Chennai, India. 12.-13. 1.
    • Weckenmann, A.: Geometrical measurements in precision engineering - challenges and approaches. In: Proceedings of the First national conference in precision engineering, Chennai, India. 12.-13. 1. 2000, S. 25-35
    • (2000) Proceedings of the First National Conference in Precision Engineering , pp. 25-35
    • Weckenmann, A.1
  • 10
    • 0041299622 scopus 로고
    • SXM-Methoden - Nützliche Werkzeuge für die Praxis?
    • September
    • Fuchs, H.: SXM-Methoden - nützliche Werkzeuge für die Praxis? In: Physikalische Blätter 50 (September 1994), No. 9, S. 837-843.
    • (1994) Physikalische Blätter , vol.50 , Issue.9 , pp. 837-843
    • Fuchs, H.1
  • 11
    • 0030148711 scopus 로고    scopus 로고
    • Axicon-type test interferometer for cylindrical surfaces
    • Brinkmann S., Dresel T., Schreiner R., Schwider J.: Axicon-type test interferometer for cylindrical surfaces. In: Optik 102 (1996), No. 3, S. 106-110.
    • (1996) Optik , vol.102 , Issue.3 , pp. 106-110
    • Brinkmann, S.1    Dresel, T.2    Schreiner, R.3    Schwider, J.4
  • 14
    • 84876609280 scopus 로고    scopus 로고
    • Gordon and Breach Science Publishers, ISSN 1355-185XPRMIFZ
    • Welland M.; Miles, M. J.: Probe Microscopy, Gordon and Breach Science Publishers, ISSN 1355-185XPRMIFZ.
    • Probe Microscopy
    • Welland, M.1    Miles, M.J.2
  • 16
    • 0004090924 scopus 로고
    • General requirements for the competence of calibrating and testing laboratories
    • ISO Guide 25, General requirements for the competence of calibrating and testing laboratories, 1990.
    • (1990) ISO Guide 25


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.