Axicon-type test interferometer for cylindrical surfaces

Optik (Jena)

Volumn 102, Issue 3, 1996, Pages 106-110

  Brinkmann, S ^a   Dresel, Th ^a   Schreiner, R ^a   Schwider, J ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT LIGHT; COMPUTER APPLICATIONS; HOLOGRAMS; INTERFEROMETRY; LIGHT INTERFERENCE; MATERIALS TESTING; NUMERICAL ANALYSIS; OPTICAL DEVICES; PHASE SHIFT; SENSITIVITY ANALYSIS; SPECKLE; SURFACES;

AXICON-TYPE TEST INTERFEROMETER; COMPUTER GENERATED DIFFRACTIVE AXICON ELEMENTS; CYLINDRICAL SURFACE; FRINGE PATTERN; GRAZING INCIDENCE; PHASE SHIFTING INTERFEROMETRY;

INTERFEROMETERS;

EID: 0030148711     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

1. N. Abramson: The Interferoscope : a new type of interferometer with variable fringe separation. Optik 30 (1969) 56-71.
2. K. Birch: Oblique incidence interferometry applied to non-optical surfaces. J. Phys. E (GB) 6 (1973) 1045-1048.
3. J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk: Semiconductor wafer and technical flat planeness testing interferometer. Measurement 5 (1987) 98-101.
4. B. R. Brown, A. W. Lohmann: Complex spacial filtering with binary masks. Appl. Opt. 5 (1966) 967-969.
5. J. Schwider: Verfahren und Anordnung zur Prüfung beliebiger Mantelflächen rotationssymmetrischer Festkörper mittels synthetischer Hologramme. DDR WP 106 769, Anmeldetag: 04.01.1972.
6. J. Schwider: Advanced evaluation techniques in interferometry. Progress in Optics Vol. XXVIII (1990) 271-359.
7. Th. Dresel, J. Schwider, A. Wehrhan, S. Babin: Grazing incidence interferometry applied to the measurement of cylindrical surfaces. Opt. Eng. 34 (1995) 3531-3535.