Combined method of electron-beam lithography and ion implantation techniques for the fabrication of high-temperature superconductor Josephson junctions

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4100-4104

  Hollkott, J ^a   Hu, S ^a   Becker, C ^a   Auge, J ^a   Spangenberg, B ^a   Kurz, H ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5344277591     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588599     Document Type: Article

References (14)

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