Thickness dependence of C-54 TiSi2 phase formation in TiN/Ti/Si(100) thin film structures annealed in nitrogen ambient

Journal of Applied Physics

Volumn 86, Issue 8, 1999, Pages 4304-4311

  Santucci, S ^a   Phani, A R ^a   De Biase, M ^b   Alfonsetti, R ^b   Moccia, G ^b   Terracciano, A ^b   Missori, M ^b  

^a UNIVERSITY OF L'AQUILA   (Italy)

^b Micron Technology Italia   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042192182     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371361     Document Type: Article

References (18)

1. G. Ottaviani, J. Vac. Sci. Technol. 16, 1112 (1979).
2. G. Ottaviani and C. Nobili, Thin Solid Films 163, 111 (1988).
3. S. P. Murarka, J. Vac. Sci. Technol. 17, 775 (1980).
4. J. Winnerl, Mater. Res. Soc. Symp. Proc. 37, 320 (1994).
5. R. Beyers and R. Sinclair, J. Appl. Phys. 57, 5240 (1985).
6. K. L. Saenger, C. Cabral, Jr., L. A. Clevenger, R. A. Roy, and S. Wind, J. Appl. Phys. 78, 7040 (1995), and references therein.
7. G. Bentini, R. Nipoti, A. Armigliato, M. Berti, A. V. Drigo, and C. Choen, J. Appl. Phys. 57, 270 (1985).
8. L. M. Wang and S. T. Wu, Jpn. J. Appl. Phys., Part 1 36, 6475 (1997); 37, 638 (1998).
9. L. M. Wang and S. T. Wu, Jpn. J. Appl. Phys., Part 1 36, 6475 (1997); 37, 638 (1998).
10. T. Ohguro, S. I. Nakamura, M. Koike, T. Moritomo, A. Nishiyama, Y. Ushiku, T. Yoshitomi, M. Ono, M. Saito, and H. Iwai, IEEE Trans. Electron Devices ED-41, 2305 (1994).
11. Leo Miglio, M. Iannuzzi, M. G. Grimaldi, F. La Via, F. Marabelli, F. Bocelli, S. Santucci, and A. R. Phani, Solid-State Electron. 43, 1069 (1999).
12. S. Santucci, L. Lozzi, M. Passacantando, P. Picozzi, R. Alfonsetti, R. Diamanti, and G. Moccia, Thin Solid Films 290, 376 (1996).
13. S. Q. Wang, J. Schlueter, C. Gondran, and T. Boden, J. Vac. Sci. Technol. B 14, 1846 (1996).
14. H. L. Tsai, J. Electrochem. Soc. 137, 309 (1990).
15. P. Stadelmann, Ultramicroscopy 21, 131 (1987).
16. B. E. Warren, X-ray Diffraction (Dover, New York, 1990), p. 253. Note: Sherrer equation does not yield high accurate grain size determination and tends to over estimate the particle size at low angles of 2θ.
17. Z. Ma, L. H. Allen, and D. D. J. Allmann, J. Appl. Phys. 77, 4384 (1995).
18. H. Jeon, C. A. Sukow, J. W. Honeycutt, G. A. Rozgonyi, and R. J. Nemanich, J. Appl. Phys. 61, 4269 (1992).