Texturing, surface energetics and morphology in the C49-C54 transformation of TiSi2

Solid-State Electronics

Volumn 43, Issue 6, 1999, Pages 1069-1074

  Miglio, Leo ^a   Iannuzzi, M ^a   Grimaldi, M G ^b   La Via, F ^c   Marabelli, F ^b   Bocelli, S ^b   Santucci, S ^d   Phani, A R ^d  

^a I 20126   (Italy)

^b INFM   (Italy)

^c CNR IMETEM   (Italy)

^d via Vetoio 10 I 67010   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; INTERFACIAL ENERGY; LIGHT MEASUREMENT; LIGHT SCATTERING; MORPHOLOGY; SUBSTRATES; SURFACE ROUGHNESS; TEXTURES;

SUBSTRATE MICROSTRUCTURE;

TITANIUM COMPOUNDS;

EID: 0032629797     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(99)00026-X     Document Type: Article

References (5)

1. Tung RT, Maex K, Pellegrini PW, Allen LH, editors. Silicide thin films: fabrication, properties and applications. MRS Symp Proc 1996;402.
2. Harper J.M.E., Rodbell K.P. J Vac Sci Technol B. 15:1997;763.
3. Bennett H.E., Portens J.O. J Opt Soc Am. 51:1961;123.
4. Lavoie C, Martel R, Cabral C Jr., Clevenger LA, Harper JME. In: Cammarata RC, Chason EH, Einstein TL, Williams ED, editors. Structure and evolution of surfaces, MRS Symp. Proc 1997;440:389.
5. Roy R.A., Clevenger L.A., Cabral C. Jr., Saenger K.L., Brauer S., Jordan-Sweet J., Bucchignano J., Stephensen G.B., Morales G., Ludwig K.F. Jr. Appl Phys Lett. 66:1995;1732.