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Volumn 12, Issue 8, 2003, Pages 1357-1361

Nucleation and growth of CVD diamond films on patterned substrates

Author keywords

Diamond; Diamond like carbon; Nucleation

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; MICROELECTROMECHANICAL DEVICES; NUCLEATION; SCANNING ELECTRON MICROSCOPY; SILICA;

PLASMA ASSISTED DEPOSITION;

DIAMOND FILMS;

DIAMOND;

EID: 0042122705 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(03)00106-7 Document Type: Article

Times cited : (19)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.