Nonlinear analytical reduced-order modeling of MEMS

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 150-153

  Westby, E R ^a   Fjeldly, T A ^a  

^a NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

Author keywords

MEMS; Nonlinear normal modes; Reduced order models

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; DEFLECTION (STRUCTURES); EIGENVALUES AND EIGENFUNCTIONS; MATHEMATICAL MODELS; MODAL ANALYSIS; NONLINEAR SYSTEMS; SYSTEMS ANALYSIS;

MODAL TRUNCATION PROCEDURES; NON-MODELED MODES; NONLINEAR NORMAL MODES (NNM); REDUCED-ORDER MODELS;

MICROELECTROMECHANICAL DEVICES;

EID: 0042038289     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. S.D. Senturia, "CAD Challenges for Microsensors, Microactuators, and Microsystems" Proc. of the IEEE, Vo. 86, No. 8., August 1998.
2. G.K. Ananthasuresh, R.K. Gupta, S.D. Senturia, "An Approach to Macromodeling of MEMS for Nonlinear Dynamic Simulations", DSC-Vol. 59, Microelectromechanical Systems (MEMS) ASME 1996
3. L.D. Gabbay, "Computer Aided Macromodeling for MEMS", PhD-thesis, MIT, June 1998.
4. E. Pesheck and C. Pierre, "A Global Methodology for the Modal Reduction of Large Nonlinear Systems Containing Quadratic and Cubic Nonlinearities", Proc. of DETC'97, 1997 ASME Design Engineering Technical Conferences.
5. A. F. Vakakis, "Non-linear Normal Modes (NNMs) And Their Applications In Vibration Theory: An Overview", Mechanical systems and signal processing, Vol:11(1), pp. 3-22, 1997.
6. A.F. Vakakis, "Normal Modes and Localization In Nonlinear Systems" John Wiley & Sons, 1996.
7. S.W. Shaw and C. Pierre, "Non-linear Normal Modes and Invariant Manifolds" J. of Sound and Vibration, Vol. 150 (1), pp. 170-173, 1991.
8. R.B. Nelson, "Simplified Calculation of Eigenvector Derivatives" AIAA Journal, Vol. 14 (9), pp. 1201-1205, 1976.
9. T.R. Sutter, C.J. Camarda, J.L. Walsh, H.M. Adelmans, "Comparison of Several Methods for Calculating Vibration Mode Shape Derivatives", AIAA Journal, Vol. 26, No. 12, pp.1506-1511, 1988.
10. M.I. Friswell, "The derivatives of repeated eigenvalues and their associated eigenvectors", Journal of vibration and acoustics, Vol. 118, July, pp. 390-397, 1996.
11. S.P. Kenny and G.J.W. Hou, "Approximate Analysis for Repeated Eigenvalue Problems With Applications to Controls-Structures Integrated Design", NASA Technical Paper 3439, June 1994.
12. E.R. Westby and T.A. Fjeldly, "Dynamical Equivalent-Circuit Modeling of MEMS with Squeezed Gas Film Damping", to be published.