Oxygen environmental Auger electron spectroscopy: Eliminating the electron beam effects on Al2O3 during Auger analysis

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1009-1016

  Guo, Hansheng ^a   Maus Friedrichs, W ^b   Kempter, V ^b   Ji, Y ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

^b CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CRYSTAL DEFECTS; DESORPTION; ELECTRON BEAMS; ELECTRON SPECTROSCOPY; IRRADIATION; OXYGEN;

CHARGE COMPENSATION; ELECTRON STIMULATED DESORPTION;

AUGER ELECTRON SPECTROSCOPY;

EID: 0042030927     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1582453     Document Type: Article

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