Charging phenomena and charge compensation in AES on metal oxides and silica

Surface and Interface Analysis

Volumn 25, Issue 6, 1997, Pages 390-396

  Guo, Hansheng ^a   Maus Friedrichs, W ^a   Kempter, V ^a  

^a CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Aluminium oxide; Electron Stimulated Desorption; Environmental AES; Insulating surfaces; Silicon oxide

Indexed keywords

ALUMINA; AUGER ELECTRON SPECTROSCOPY; CARBON; CONTAMINATION; CURRENT DENSITY; DESORPTION; ELECTRON BEAMS; OXYGEN; RADIATION DAMAGE; SILICA; ZIRCONIA;

CHARGE COMPENSATION; CHARGING PHENOMENA; ELECTRON STIMULATED DESORPTION;

SURFACE PHENOMENA;

EID: 0031166351     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199706)25:6<390::AID-SIA247>3.0.CO;2-X     Document Type: Article

References (16)

1. W. Wei, J. Vac. Sci. Technol. A6(4), 2576 (1988).
2. S. Ichimura, H. E. Bauer, H. Seiler and S. Hofmann, Surf. Interface Anal. 14, 250 (1989).
3. G. Barth, R. Linder and C. Bryson, Surf. Interface Anal. 11, 307 (1988).
4. J. Kirschner, Scanning Electron Microsc. 1, 215 (1976).
5. C. Le Gressus, F. Valin, M. Gautier, J. P. Duraud, J. Cazaux and H. Okuzumi, Scanning 12, 203 (1990).
6. G. Ohlendorf, W. Koch, V. Kempter and G. Borchardt, Surf. Interface Anal. 17, 947 (1991).
7. D. L. Carroll, D. L. Doering and P. Xiong-Skiba, J. Vac. Sci. Technol. A11. 2312 (1993).
8. K.-O. Axelsson, K.-E. Keck and B. Kasemo, Appl. Surf. Sci. 25, 217 (1986).
9. J. P. Vigouroux, J. P. Duraud, A. Le Moel, C. Le Gressus and D. L Griscom, J. Appl. Phys. 57, 5139 (1985).
10. 2, ed. by R. A. B. Devine, p. 119. Plenum Press, New York, (1988).
11. U.K. Kanaya, S. Ono and F. Ishigaki, J. Phys. D 11, 2425 (1978).
12. S. M. Rowland, R. M. Hill and L. A. Dissado, J. Phys. C 19, 6263 (1986).
13. K. Hamano, Jpn. J. Appl. Phys. 13, 1085 (1974).
14. K. P. R. Reddy and A. R. Cooper, J. Am. Ceram. Soc. 65, 634 (1982).
15. G. P. Pellsand and A. Y. Stathopoulos, Radiat. Eff. 74, 181 (1983).
16. N. Lieske and R. Hezel, Thin Solid Films 51, 217 (1979).