High temperature behavior of polysilicon

Materials Research Society Symposium - Proceedings

Volumn 741, Issue , 2002, Pages 53-58

  Oh, Chung Seog ^a   Coles, George ^a   Sharpe, William N ^a  

^a Johns Hopkins University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CREEP TESTING; DEFORMATION; DUCTILITY; HIGH TEMPERATURE PROPERTIES; INTERFEROMETRY; STRAIN; STRAIN MEASUREMENT; TENSILE STRESS; THIN FILMS;

PLATINUM MARKERS; THERMAL ACTUATORS; THIN FILM POLYSILICON;

POLYSILICON;

EID: 0042009834     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/proc-741-j3.6     Document Type: Article

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