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Volumn 13, Issue 8, 1998, Pages 895-899
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Effect of substrate temperature on precipitate coarsening and Co distribution in Si implanted by Co ions with a metal vapour vacuum arc ion source
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0041858787
PISSN: 02681242
EISSN: None
Source Type: Journal
DOI: 10.1088/0268-1242/13/8/012 Document Type: Article |
Times cited : (2)
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References (17)
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