A Locally Relevant Wafer-Scale Model for CMP of Silicon Dioxide

Journal of the Electrochemical Society

Volumn 150, Issue 9, 2003, Pages

  Castillo Mejia, D ^a   Beaudoin, S ^b  

^a INTEL CORPORATION   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEFORMATION; SILICA; STRAIN;

CONTACT PRESSURE;

SILICON WAFERS;

EID: 0041779930     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1598967     Document Type: Article

References (19)

1. J. Steigerwald, S. Murarka, and R. Gutmann, Chemical Mechanical Planarization of Microelectronic Materials, John Wiley, New York (1997).
2. J. A. Greenwood and J. B. P. Williamson, Proc. R. Soc. London, Ser. A, 295, 300 (1966).
3. D. Castillo and S. Beaudoin, J. Electrochem. Soc., Submitted, (2002).
4. W.-T. Tseng and Y.-L. Wang, J. Electrochem. Soc., 144, L15 (1997).
5. B. Zhao and F. G. Shi, Electrochem. Solid-State Lett., 2(3), 145 (1999).
6. H. Hocheng, H. Y. Tsai, and Y. T. Su, J. Electrochem. Soc., 148, G581 (2001).
7. P. Wrschka, J. Hernandez, Y. Hsu, T. S. Kuan, G. S. Oehrlein, H. J. Sun, D. A. Hansen, J. King, and M. A. Fury, J. Electrochem. Soc., 146, 2689 (1999).
8. E. F. Byars, R. D. Snyder, and H. L. Plants, Engineering Mechanics of Deformable Bodies, 4th ed., p. 72, Harper and Row Publishers, New York (1983).
9. J. I. McCool, Wear, 107, 37 (1986).
10. B. Bhushan, Tribology and Mechanics of Magnetic Devices, 2nd ed., Springer, New York (1996).
11. K. L. Johnson, Contact Mechanics, Cambridge University Press, New York (1987).
12. A. S. Lawing and R. Rhoades, Rodel, Inc., AVS Northern CA, CMPUG (2001).
13. K. Cooper, Personal communication (2002).
14. Q. Luo, S. Ramarajan, and S. V. Babu, Thin Solid Films, 335, 160 (1998).
15. G. B. Basim, J. J. Adler, U. Mahajan, R. K. Singh, and B. M. Moudgil, J. Electrochem. Soc., 147, 3523 (2000).
16. D. Castillo, Unpublished data (2001).
17. Table curve 2D User's Manual, SPSS (2001).
18. MathCad 7.0 User's Manual, MathSoft Co., Cambridge, MA (2000).
19. W. Mendenhall, R. L. Schaeffer, and D. D. Wackerly, Mathematical Statistics with Applications, 3rd ed., PWS Publishers, Boston, MA (1986).