Scanning Auger microscopy study of W tips for scanning tunneling microscopy

Review of Scientific Instruments

Volumn 74, Issue 7, 2003, Pages 3368-3378

  Ottaviano, L ^a   Lozzi, L ^a   Santucci, S ^a  

^a UNIVERSITY OF L'AQUILA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; ETCHING; SCANNING TUNNELING MICROSCOPY; SPUTTERING;

LATERAL RESOLUTION;

TUNGSTEN;

EID: 0041766302     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1581392     Document Type: Article

References (36)

1. G. Binning and H. Rohrer, Helv. Phys. Acta 55, 726 (1982).
2. R. P. Feynman, California Institute of Technology (CALTECH) Engineering Science; February (1960) {http://www.zyvex.com/nanotech/feynman.html}
3. G. A. Fiete, J. S. Hersch, E. J. Heller, H. C. Manoharan, C. P. Lutz, and D. M. Eigler, Phys. Rev. Lett. 86, 2392 (2001).
4. A description of the various tip etching procedures can be found in Sec. 3.2.1 of: T. T. Tsong, Atom Probe Field Ion Microscopy (Cambridge University Press, Cambridge. 1990).
5. M. Cavallini and F. Biscarini, Rev. Sci. Instrum. 71, 4457 (2000).
6. C. S. Chang, W. B. Su, and T. T. Tsong, Phys. Rev. Lett. 72, 574 (1994).
7. A. J. Melmed, J. Vac. Sci. Technol. B 9. 601 (1991).
8. J. P. Ibe, P. P. Bey, Jr., S. L. Branbow, R. A. Brizzolara, N. A. Burnham, D. P. Di Lella, K. P. Lee, C. R. K. Marrian, and M. J. Colton, J. Vac. Sci. Technol. A 8, 3570(1990).
9. M. Bode. O. Pietzsch, A. Kubetzka, and R. Wiesendanger, J. Electron Spectrosc. Relat. Phenom. 111, 1055 (2001).
10. V. T. Binh and N. Garcia, Ultramicroscopy 42, 80 (1992).
11. R. M. Feenstra, J. A. Stroscio, and A. P. Fein, Surf. Sci. 181, 295 (1987).
12. O. Albrektsen, H. W. Salemink, K. A. Mørch, and A. R. Thölén, J. Vac. Sci. Technol. B 12, 3187 (1994).
13. L. A. Hockett and S. E. Creager, Rev. Sci. Instrum. 64, 263 (1993).
14. D. K. Biegeisen, F. A. Ponce, J. C. Tramontanta, and S. M. Koch, Appl. Phys. Lett. 50, 696 (1987).
15. D. K. Biegeisen, F. A. Ponce, and J. C. Tramontanta, Appl. Phys. Lett. 54, 1223 (1989).
16. W. Hauffe, and E. Paneff, Proceedings of the 11th European Conference on Electron Microscopy, Dublin, 1996, Vol. 1, p. 1.
17. R. Zhang and D. G. Ivey, J. Vac. Sci. Technol. B 14, 1 (1996).
18. P. Hoffrogge, H. Kopf, and R. Reichelt, J. Appl. Phys. 90, 5322 (2001).
19. S. Heike, T. Hashizume, and Y. Wada, J. Vac. Sci. Technol. B 14, 1522 (1996).
20. J. Garneas, F. Kragh, K. A. Mørch, and R. A. Thölén, J. Vac. Sci. Technol. A 8, 441 (1990).
21. C. J. Chen, Ultramicroscopy 42, 1653 (1992).
22. Y. Kuk and P. J. Silverman, Appl. Phys. Lett. 48, 1597 (1986).
23. A. Cricenti, E. Paparazzo, M. A. Scarselli, L. Moretto, and S. Selci, Rev. Sci. Instrum. 65, 1558(1994).
24. E. Paparazzo, L. Moretto, S. Selci, M. Righini, and I. Farnè, Vacuum 52,421 (1999).
25. L. Ottaviano, G. Profeta, A. Continenza, S. Santucci, A. J. Freeman, and S. Modesti, Surf. Sci. 464, 57 (2000).
26. K. D. Childs, B. A. Carlson, L. A. LaVanier, J. F. Moulder, D. F. Paul, W. F. Stickle, and D. G. Watson, in Handbook of Auger Electron Spectroscopy, 3rd ed., edited by C. L. Hedberg (Physical Electronics, Eden Prairie, 1995).
27. S. Tanuma, C. J. Powell, and D. R. Penn, J. Vac. Sci. Technol. A 8, 2213 (1990).
28. We remark that point Auger spectra with acquisition times longer then those typical of the spectra presented in this work could not be taken without a significant worsening of the spatial resolution.
29. T. Vogt, P. M. Woodward, and B. H. Hunter, J. Solid State Chem. 144, 209 (1999).
30. J. Bludska and I. Jakubec, Z. Phys. Chem. (Munich) 194, 69 (1996).
31. CRC Handbook of Chemistry and Physics, edited by D. R. Lide (CRC, Boston, MA, 1990).
32. C. A. Hample, The Encyclopedia of the Chemical Elements (Reinhold, New York, 1968), p. 768.
33. Y. Goldstein, A. Many, S. Z. Weisz, M. Gomez, O. Resto, and M. H. Farias, J. Electron Spectrosc. Relat. Phenom. 67, 511 (1994).
34. G. P. Chambers and J. Fine, in Practical Surface Analysis, 2nd ed., Ion and Neutral Spectroscopy, Vol. 2, edited by D. Briggs and M. P. Seah (Wiley, New York, 1992).
35. N. E. Promisel, Tungsten, Tantalum, Molybdenum, Niobium, and Their Alloys (Pergamon, New York, 1964), p. 293.
36. L. Ottaviano, M. Crivellari, L. Lozzi, and S. Santucci, Surf. Sci. 445, L41 (2000).