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Volumn 198-199, Issue pt 2, 1999, Pages 1235-1239
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Optical properties of thin CVD-tungsten oxide films by spectroscopic ellipsometry
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
COMPOSITION;
CRYSTAL STRUCTURE;
ELLIPSOMETRY;
OPTICAL PROPERTIES;
PYROLYSIS;
SILICON;
SUBSTRATES;
TEMPERATURE;
TUNGSTEN COMPOUNDS;
OPTICAL CONSTANTS;
PHYSICAL COMPOSITION;
POLYCRYSTALLINE STRUCTURE;
SPECTROSCOPIC ELLIPSOMETRY;
TUNGSTEN OXIDE FILMS;
TWO LAYER MODEL;
THIN FILMS;
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EID: 0033514531
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(98)00993-2 Document Type: Article |
Times cited : (19)
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References (12)
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