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Volumn 198-199, Issue pt 2, 1999, Pages 1235-1239

Optical properties of thin CVD-tungsten oxide films by spectroscopic ellipsometry

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPOSITION; CRYSTAL STRUCTURE; ELLIPSOMETRY; OPTICAL PROPERTIES; PYROLYSIS; SILICON; SUBSTRATES; TEMPERATURE; TUNGSTEN COMPOUNDS;

EID: 0033514531     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(98)00993-2     Document Type: Article
Times cited : (19)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.