Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures

Sensors and Actuators, A: Physical

Volumn 70, Issue 1-2, 1998, Pages 61-66

  Gui, Cheng Qun ^a   De Boer, Meint ^a   Gardeniers, Johannes G E ^a   Jansen, H ^a   Berenschot, J W ^a   Elwenspoek, Miko ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Chemical mechanical polishing; Direct wafer bonding; Microelectromechanical systems (MEMS); Multilayer substrates; Reactive ion etching; Silicon on insulator

Indexed keywords

EID: 0041636126     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00113-7     Document Type: Article

References (18)

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