Construction of a new C-H-O ternary diagram for diamond deposition from the vapor phase

Diamond and Related Materials

Volumn 9, Issue 7, 2000, Pages 1320-1326

  Eaton, Sally C ^a   Sunkara, Mahendra K ^a  

^a University of Louisville   (United States)

Author keywords

Chemical vapor deposition; Composition; Diamond; Radical species

Indexed keywords

CARBON MONOXIDE; CHEMICAL VAPOR DEPOSITION; COMPUTATIONAL METHODS; FREE RADICALS; MIXTURES; PHASE COMPOSITION; PHASE DIAGRAMS; PRESSURE EFFECTS; SURFACE CHEMISTRY; THERMAL EFFECTS;

FLOW RATES; GAS MIXTURES; RADICAL SPECIES COMPOSITION; TERNARY DIAGRAM;

DIAMOND FILMS;

EID: 0033726250     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00245-4     Document Type: Article

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