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Volumn 9, Issue 7, 2000, Pages 1320-1326
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Construction of a new C-H-O ternary diagram for diamond deposition from the vapor phase
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Author keywords
Chemical vapor deposition; Composition; Diamond; Radical species
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Indexed keywords
CARBON MONOXIDE;
CHEMICAL VAPOR DEPOSITION;
COMPUTATIONAL METHODS;
FREE RADICALS;
MIXTURES;
PHASE COMPOSITION;
PHASE DIAGRAMS;
PRESSURE EFFECTS;
SURFACE CHEMISTRY;
THERMAL EFFECTS;
FLOW RATES;
GAS MIXTURES;
RADICAL SPECIES COMPOSITION;
TERNARY DIAGRAM;
DIAMOND FILMS;
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EID: 0033726250
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(00)00245-4 Document Type: Article |
Times cited : (25)
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References (15)
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