Dust transport phenomena in a capacitively coupled plasma reactor

Journal of Applied Physics

Volumn 89, Issue 1, 2001, Pages 34-41

  Kim, Heon Chang ^a   Manousiouthakis, Vasilios I ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041490495     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1285843     Document Type: Article

References (14)

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