Characterization of NbTiN thin films prepared by reactive DC-magnetron sputtering

IEEE Transactions on Applied Superconductivity

Volumn 13, Issue 2 III, 2003, Pages 3284-3287

  Matsunaga, Teruhiko ^a   Maezawa, Hiroyuki ^b   Noguchi, Takashi ^b  

^a GRADUATE UNIVERSITY FOR ADVANCED STUDIES   (Japan)

^b NATIONAL ASTRONOMICAL OBSERVATORY OF JAPAN   (Japan)

Author keywords

NbTiN; Reactive magnetron sputtering; SIS mixer; Thin films

Indexed keywords

MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; QUARTZ; SUPERCONDUCTING TRANSITION TEMPERATURE;

GAS PRESSURE;

THIN FILMS;

EID: 0041473673     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2003.812226     Document Type: Conference Paper

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