Top-edge profile control for SU-8 structural photoresist

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 2003, Pages 389-390

  Lee, S J ^a   Shi, W ^a   Maciel, P ^b   Cha, S W ^c  

^a SAN JOSE STATE UNIVERSITY   (United States)

^b Quintel Corporation   (United States)

^c STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; THIN FILMS; ULTRAVIOLET RADIATION; VAPOR DEPOSITION;

PROFILE CONTROL;

PHOTORESISTS;

EID: 0041438458     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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2. H-C Liu, "Investigation of Material Issues in Micromold Shape Deposition Manufacturing of Ceramic and Metallic Parts", M.S. Thesis, Stanford University, Stanford, CA, 2000.
3. S. W Cha, S. J. Lee, R. O'Hayre, Y. I. Park, Y. Saito, and F. B. Prinz, "Micro Fuel Cell Based on Thick Photoresist", 201th Electrochemical Society Meeting Abstracts, Philadelphia, PA, 2002.
4. V. Seidemann, S. Bütefisch, and S. Buttgenbach, "Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to microvalves and mirogrippers", Sensors and Actuators A: Physical, vol. 97-98, pp. 33-39, 2002.
5. S. Hobson, Fraunhofer USA Center for Manufacturing and Innovation, Brookline, MA (personal communications, Feb. 2003).
6. J. R. Sheats and B. W. Smith, eds., Microlithography - Science and Technology, New York: Marcel-Dekker, 1998, ch. 9.
7. J. Zhang, K. L. Tan, G. D. Hong, L. J. Yang, and H. Q. Gong, "Polymerization Optimization of SU-8 Photoresist and its Applications in Microfluidic Systems and MEMS", Journal of Micromechanics and Microengineering, vol. 11, no. 1, 2001, pp. 20-26.