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Volumn 37, Issue 3 SUPPL. B, 1998, Pages 1064-1066
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Characteristics of new poly-Si thin film transistor with a-Si channel region near the source/drain
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Author keywords
A Si (amorphous silicon); Leakage current; Poly Si (polycrystalline silicon); TFT (thin film transistor)
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Indexed keywords
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EID: 0041424413
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.37.1064 Document Type: Article |
Times cited : (2)
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References (6)
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