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Volumn 42, Issue 6 B, 2003, Pages 3937-3941
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Optical proximity correction feature extraction method using reticle scanning electron microscope images
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Author keywords
Boltzmann function; CD SEM; Discriminant analysis; Optical proximity correction (OPC); Photomask
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Indexed keywords
PATTERN MATCHING;
PHOTOLITHOGRAPHY;
PROXIMITY SENSORS;
REGRESSION ANALYSIS;
SCANNING ELECTRON MICROSCOPY;
DISCRIMINANT ANALYSIS;
FEATURE EXTRACTION;
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EID: 0041360578
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.42.3937 Document Type: Conference Paper |
Times cited : (6)
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References (7)
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