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Volumn 42, Issue 6 B, 2003, Pages 3937-3941

Optical proximity correction feature extraction method using reticle scanning electron microscope images

Author keywords

Boltzmann function; CD SEM; Discriminant analysis; Optical proximity correction (OPC); Photomask

Indexed keywords

PATTERN MATCHING; PHOTOLITHOGRAPHY; PROXIMITY SENSORS; REGRESSION ANALYSIS; SCANNING ELECTRON MICROSCOPY;

EID: 0041360578     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.3937     Document Type: Conference Paper
Times cited : (6)

References (7)
  • 4
    • 0003501167 scopus 로고
    • (Chapman and Hall Ltd., London) 1st ed., Chap. 7
    • For example, F. J. Manly: Multivariate Statistical Methods (Chapman and Hall Ltd., London, 1986) 1st ed., Chap. 7.
    • (1986) Multivariate Statistical Methods
    • Manly, F.J.1
  • 5
    • 0003487647 scopus 로고
    • Springer-Verlag, Chap. 1
    • Refer to the following references about expression of the degree of calculation complexity like O(n): F. P. Preparata and M. I. Shamos, Computational Geometry Corrected and Expanded Second Printing (Springer-Verlag, 1988), Chap. 1; S. Baase, Computer Algorithms. Introduction to Design and Analysis (Addison-Wesley, 1988) 2nd ed., Chap. 1.
    • (1988) Computational Geometry Corrected and Expanded Second Printing
    • Preparata, F.P.1    Shamos, M.I.2
  • 6
    • 0003395479 scopus 로고
    • (Addison-Wesley) 2nd ed., Chap. 1
    • Refer to the following references about expression of the degree of calculation complexity like O(n): F. P. Preparata and M. I. Shamos, Computational Geometry Corrected and Expanded Second Printing (Springer-Verlag, 1988), Chap. 1; S. Baase, Computer Algorithms. Introduction to Design and Analysis (Addison-Wesley, 1988) 2nd ed., Chap. 1.
    • (1988) Computer Algorithms. Introduction to Design and Analysis
    • Baase, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.