Oxide films: Low-temperature deposition and crystallization

Journal of Solid State Chemistry

Volumn 175, Issue 1, 2003, Pages 84-87

  Park, Sangmoon ^a   Herman, Gregory S ^b   Keszler, Douglas A ^a  

^a OREGON STATE UNIVERSITY   (United States)

^b HEWLETT PACKARD COMPANY   (United States)

Author keywords

Electronic materials; Microstructure; Oxides; Thin films

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CRYSTALLIZATION; DEHYDRATION; DEPOSITION; HYDROTHERMAL SYNTHESIS; THIN FILMS;

HYDROTHERMAL DEHYDRATION;

OXIDES;

CESIUM; SAMARIUM;

ANALYTIC METHOD; CONFERENCE PAPER; CRYSTALLIZATION; DESICCATION; FILM; HIGH TEMPERATURE; LOW TEMPERATURE; X RAY DIFFRACTION;

EID: 0041326566     PISSN: 00224596     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-4596(03)00169-5     Document Type: Conference Paper

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