Porous polycrystalline silicon conductivity sensor

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1832-1835

  Han, P G ^a   Wong, H ^a   Poon, M C ^b   Wang, N ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE VAPORS; AMBIENT PRESSURES; CONDUCTIVITY SENSORS; CURRENT INCREASE; ELECTRICAL CONDUCTION MECHANISMS; FABRICATION PROCESS; GAS SPECIES; IN-VACUUM; ORDERS OF MAGNITUDE; ORGANIC VAPORS; POLY-CRYSTALLINE SILICON; VERY LARGE SCALE INTEGRATED;

ACETONE; DISPLAY DEVICES; ETHANOL; POLYSILICON; POROUS SILICON; VAPORS;

SENSORS;

EID: 0041148704     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581899     Document Type: Conference Paper

References (19)

1. L. T. Canham, Appl. Phys. Lett. 57, 1046 (1990).
2. R. P. Vasquez, R. W. Fathauer, T. George, A. Ksendzov, and T. L. Lin, Appl. Phys. Lett. 60, 1004 (1992).
3. R. C. Anderson, R. S. Muller, and C. W. Tobias, Sens. Actuators A 21-23, 835 (1990).
4. M. B. Chorin and A. Kurex, Appl. Phys. Lett. 64, 481 (1994).
5. Porous Silicon, edited by Z. C. Feng and R. Tsu (World Scientific, 1994).
6. A. Foucaran, F. P. Delannoy, A. Giani, A. Sackda, P. Combette, and A. Boyer, Thin Solid Films 297, 317 (1997).
7. K. Watanabe, T. Okada, I. Choe, and Y. Sato, Sens. Actuators B 33, 194 (1996).
8. S. Y. Lin, K. Motesharei, K. S. Dancil, M. J. Sailor, and M. R. Ghadiri, Science 278, 842 (1996).
9. J. P. Zheng, K. L. Jiao, W. P. Shen, W. A. Anderson, and H. S. Kwok, Appl. Phys. Lett. 61, 459 (1992).
10. P. G. Han, M. C. Poon, P. K. Ko, J. K. O. Sin, and H. Wong, J. Vac. Sci. Technol. B 14, 824 (1996).
11. P. Joubert, A. Abouliatim, P. Guyader, D. Briand, B. Lambert, and M. Guendouz, Thin Solid Films 255, 96 (1995).
12. R. C. Anderson, R. S. Muller, and C. W. Tobias, J. Microelectromech. Syst. 3, 10 (1994).
13. A. G. Cullis and L. T. Canham, Nature (London) 353, 335 (1991).
14. Y. Kanemitsu, T. Ogawa, K. Shiraishi, and K. Takeda, Phys. Rev. B 48, 4883 (1993).
15. J. W. Gardner, Microsensor: Principles and Applications (Wiley, New York, 1994), p. 228.
16. Thick Films Sensors, edited by M. Prudenziati (Elsevier, New York, 1994), p. 290.
17. I. Schechter, M. Ben-Chorin, and A. Kux, Anal. Chem. 67, 3727 (1995).
18. D. Stievenard and D. Deresmes, Appl. Phys. Lett. 67, 1570 (1995).
19. S. M. Sze, Physics of Semiconductor Devices (Wiley, New York, 1979), p. 654.