Investigation of electronegativity in a radio-frequency Xe/SF6 inductively coupled plasma using a langmuir probe

Applied Physics Letters

Volumn 79, Issue 18, 2001, Pages 2874-2876

  Kimura, T ^a   Ohe, K ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040750314     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1414297     Document Type: Article

References (9)

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