Characterization of the negative ion fraction in high-density SF6 magnetoplasmas using ion acoustic waves

Applied Physics Letters

Volumn 72, Issue 3, 1998, Pages 290-292

  St Onge, L ^a   Margot, J ^a   Chaker, M ^b  

^a UNIVERSITÉ DE MONTRÉAL   (Canada)

^b INRS EMT   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000806374     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120715     Document Type: Article

References (22)

1. M. Bacal, Phys. Scr. T2/2, 467 (1982).
2. O. J. Orient, A. Chutjian, and E. Murad, Phys. Rev. A 41, 4106 (1990).
3. H. Shindo, Y. Sawa, and Y. Horiike, Jpn. J. Appl. Phys., Part 2 34, L925 (1995);
4. S. Samukawa, Appl. Phys. Lett. 68, 316 (1996).
5. S. R. Leone, Jpn. J. Appl. Phys., Part 1 34, 2073 (1995).
6. M. Bacal, G. W. Hamilton, A. M. Bruneteau, H. J. Doucet, and J. Taillet, Rev. Sci. Instrum. 50, 719 (1979);
7. R. A. Gottscho and C. E. Gaebe, IEEE Trans. Plasma Sci. 14, 92 (1986);
8. A. Kono, M. Endo, K. Ohata, S. Kishimoto, and T. Goto, J. Appl. Phys. 76, 7221 (1994).
9. H. J. Doucet, Phys. Lett. 33A, 283 (1970).
10. N. D'Angelo, S. von Goeler, and T. Ohe, Phys. Fluids 3, 1605 (1966).
11. J. L. Cooney, D. W. Aossey, J. E. Williams, M. T. Gavin, H. S. Kim, Y.-C. Hsu, A. Scheller, and K. E. Lonngren, Plasma Sources Sci. Technol. 2, 73 (1993), and references therein;
12. Y. Nakamura, T. Odagiri, and I. Tsukabayashi, Plasma Phys. Controlled Fusion 39, 105 (1997).
13. N. Sato, T. Mieno, T. Hirata, Y. Yagi, R. Hatakeyama, and S. Iizuka, Phys. Plasmas 1, 3480 (1994).
14. F. Bounasri, M. Moisan, L. St-Onge, J. Margot, M. Chaker, J. Pelletier, M. A. El Khakani, and E. Gat, J. Appl. Phys. 77, 4030 (1995).
15. F. Bounasri, E. Gat, M. Chaker, M. Moisan, J. Margot, and M. F. Ravet, J. Appl. Phys. 78, 6780 (1995);
16. E. Gat, F. Bounasri, M. Chaker, M. F. Ravet, M. Moisan, and J. Margot, Microelectron. Eng. 30, 337 (1996).
17. L. St-Onge, Ph.D. thesis, Université de Montréal, 1996;
18. L. St-Onge, M. Chaker, and J. Margot, manuscript in preparation.
19. L. St-Onge, J. Margot, and M. Chaker, Plasma Sources Sci. Technol. (1997) (submitted).
20. Ion dynamics have been shown to be similar in argon and chlorine plasmas. See T. Nakano, N. Sadeghi, D. J. Trevor, R. A. Gottscho, and R. W. Boswell, J. Appl. Phys. 72, 3384 (1992).
21. B. Petit, Ph.D. thesis, Université Scientifique et Médicale de Grenoble, 1985;
22. B. Petit and J. Pelletier, Jpn. J. Appl. Phys., Part 1 26, 825 (1987).