Dislocations induced by boron diffusion in silicon: A transmission electron microscopy study

Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties

Volumn 75, Issue 1, 1997, Pages 115-135

  Ning, X J ^a,b  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040748054     PISSN: 01418610     EISSN: None     Source Type: Journal    
DOI: 10.1080/01418619708210286     Document Type: Article

References (25)

1. Amelinckx, S., 1979, Dislocations in Solids, Vol. 2, edited by F. R. N. Nabarro (Amsterdam: North-Holland), pp. 67-160.
2. Bohg, A., 1971, J. Electrochem Soc., 118, 401.
3. Carpenter, R. W., and Spence, J. C. H., 1982, Acta crystallogr. A, 38, 55.
4. Chu, W., Mehregany, M., Ning, X. J., and Pirouz, P., 1992, Materials Research Society Symposium Proceedings, Vol. 239, (Pittsburgh, Pennsylvania: Materials Research Society), p. 169.
5. Czaja, W., 1966, J. appl. Phys., 37, 3441.
6. Ding, X., 1990, PhD Thesis, Case Western Reserve University.
7. Farber, B. Ya., and Nikitenko, V. I., 1982, Phys. Stat. sol. (a), 73, K141.
8. Fung, K. K., 1985, Ultramicrosopy, 17, 81.
9. Hagen, W., and Strunk, H., 1978, Appl. Phys., 17, 85.
10. Hirth, J. P., and Lothe, J., 1982, Theory of Dislocations, second edition (New York: McGraw-Hill).
11. Kaminsky, G., 1985, J. vac. Sci. Technol. B, 3, 741.
12. Maree, P. M. J., Barbour, J. C., vander Veen, J. F., Kavanagh, K. L., Bulle-Lieuwma, C. W. T., and Viegers, M. P. A., 1987, J. appl. Phys., 62, 4413.
13. Maseeh, F., and Sentruria, S. D., 1990, Sensors Actuators A, 21, 861.
14. Mehregany, M., 1986, MS Thesis, Massachusetts Institute of Technology.
15. Mehregany, M., Sentruria, S. D., 1988, Sensors Actuators, 13, 375.
16. Ning, X. J., 1996, J. Electrochem Soc., 143, 3389.
17. Ning, X. J., and Pirouz, P., 1991, Microscopy of Semiconducting Materials, Institute of Physics Conference Series No. 117 (Bristol: Institute of Physics), p. 203.
18. Ning, X. J., and Pirouz, P., 1993, Materials Research Society Symposium Proceedings, Vol. 308 (Pittsburgh, Pennsylvania: Materials Research Society), p. 427.
19. Ning, X. J., and Pirouz, P., 1994, Materials Research Society Symposium Proceedings, Vol. 319 (Pittsburgh, Pennsylvania: Materials Research Society), p. 441.
20. Ning, X. J., and Pirouz, P., 1996, Acta. Mater., 44, 2127.
21. Palik, E. D., Bermudez, V. M., and Glembocki, O., 1985, J. Electrochem. Soc., 132, 135.
22. Prussin, S., 1961, J. appl. Phys., 32, 1876.
23. Queisser, H. J., 1961, J. appl. Phys., 32, 1776.
24. Schwuttke, C. H., and Queisser, H. J., 1962, J. appl. Phys., 33, 1540.
25. Washburn, J., Thomas, G., and Queisser, H. J., 1964, J. appl. Phys., 35, 1909.