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Volumn 3, Issue 7, 1996, Pages 2511-2522
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Effects of static magnetic fields on rf-driven plasma sheaths
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0013497292
PISSN: 1070664X
EISSN: None
Source Type: Journal
DOI: 10.1063/1.871969 Document Type: Article |
Times cited : (6)
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References (12)
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