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Volumn 124, Issue 1, 2002, Pages 22-26

On the study of piezoresistive stress sensors for microelectronic packaging

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Indexed keywords


EID: 0039886668     PISSN: 10437398     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1414134     Document Type: Article
Times cited : (22)

References (17)
  • 3
    • 0020878106 scopus 로고
    • Quality of die-attachment and its relationship to stress and vertical die-cracking
    • Van Kessel, C. G. M., Gee, S. A., and Murphy, J. J., 1983, "Quality of Die-attachment and its Relationship to Stress and Vertical Die-Cracking." IEEE Trans. Compon., Hybrids, Manuf. Technol., CHMT-6, pp. 414-420.
    • (1983) IEEE Trans. Compon., Hybrids, Manuf. Technol. , vol.CHMT-6 , pp. 414-420
    • Van Kessel, C.G.M.1    Gee, S.A.2    Murphy, J.J.3
  • 5
    • 0005765931 scopus 로고
    • Thermal strain measurements in electronic packaging through fractional fringe moire interferometry
    • Bastawros, A. F., and Vososhin, A. S., 1990, "Thermal Strain Measurements in Electronic Packaging Through Fractional Fringe Moire Interferometry," ASME J. Electron. Packag., 112, No. 4, pp. 303-308.
    • (1990) ASME J. Electron. Packag. , vol.112 , Issue.4 , pp. 303-308
    • Bastawros, A.F.1    Vososhin, A.S.2
  • 6
    • 0030212739 scopus 로고    scopus 로고
    • Application of nondestructive testing methods to electronic industry using computer-aided optical metrology
    • Jin, G., Bao, N. K., and Chung, P. S., 1996, "Application of Nondestructive Testing Methods to Electronic Industry Using Computer-Aided Optical Metrology," Opt. Lasers Eng., 25, No. 2-3, pp. 81-91.
    • (1996) Opt. Lasers Eng. , vol.25 , Issue.2-3 , pp. 81-91
    • Jin, G.1    Bao, N.K.2    Chung, P.S.3
  • 14
    • 84866859443 scopus 로고
    • High accuracy die mechanical stress measurement with ATC04 assembly test chip
    • Sweet, J. N., and Peterson, D. W., 1993, "High Accuracy Die Mechanical Stress Measurement with ATC04 Assembly Test Chip," 1993 IRW Final Report, pp. 90-97.
    • (1993) 1993 IRW Final Report , pp. 90-97
    • Sweet, J.N.1    Peterson, D.W.2
  • 15
    • 0000023102 scopus 로고
    • Piezoresisitve properties of silicon diffused layers
    • Tufte, O. N., and Stelzer, E. L., 1963, "Piezoresisitve Properties of Silicon Diffused Layers," J. Appl. Phys., 34. pp. 313, and 1964 "Piezoresisitve Properties of Heavily Doped n-type Silicon," Phys. Rev., 133A. pp. 1705.
    • (1963) J. Appl. Phys. , vol.34 , pp. 313
    • Tufte, O.N.1    Stelzer, E.L.2
  • 16
    • 0001477655 scopus 로고
    • Piezoresisitve properties of heavily doped n-type silicon
    • Tufte, O. N., and Stelzer, E. L., 1963, "Piezoresisitve Properties of Silicon Diffused Layers," J. Appl. Phys., 34. pp. 313, and 1964 "Piezoresisitve Properties of Heavily Doped n-type Silicon," Phys. Rev., 133A. pp. 1705.
    • (1964) Phys. Rev. , vol.133 A , pp. 1705


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.