Application of nondestructive testing methods to electronic industry using computer-aided optical metrology

Optics and Lasers in Engineering

Volumn 25, Issue 2-3 SPEC. ISS., 1996, Pages 81-91

  Jin, Guanchang ^a   Bao, N K ^b   Chung, P S ^b  

^a TSINGHUA UNIVERSITY   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED ANALYSIS; CORRELATION METHODS; ELECTRONIC EQUIPMENT; INTERFEROMETERS; NONDESTRUCTIVE EXAMINATION; PHASE SHIFT; SPECKLE;

DIGITAL SPECKLE CORRELATION METHOD; ELECTRONIC SHEARING SPECKLE PATTERN INTERFEROMETER; ELECTRONIC SPECKLE PATTERN INTERFEROMETER; OPTICAL METROLOGY;

OPTICAL SYSTEMS;

EID: 0030212739     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/0143-8166(95)00056-9     Document Type: Article

References (7)

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3. Jin, G. C., Bao, N. K. & Chung, P. S., A new computer-controlled polarization-shifting technique. SPIE, 2066 (1993) 67-71.
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