Electron and ion optical design software for integrated circuit manufacturing equipment

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2692-2701

  Munro, Eric ^a  

^a Munro's Electron Beam Software Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039266615     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589710     Document Type: Article

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