Transmission electron microscopy on {113} rodlike defects and {111} dislocation loops in silicon-implanted silicon

Journal of Applied Physics

Volumn 82, Issue 2, 1997, Pages 601-606

  Pan, G Z ^a   Tu, K N ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039127945     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365587     Document Type: Article

References (18)

1. N. E. B. Cowern, K. T. F. Janssen, and H. F. F. Jos, J. Appl. Phys. 68, 6191 (1990).
2. V. Raineri, V. Privitera, G. Galvagno, F. Priolo, and E. Rimini, Mater. Chem. Phys. 38, 105 (1994).
3. K. S. Jones, J. Liu, L. Zhang, V. Krishnamoorthy, and R. T. DeHeff, Nucl. Instrum. Methods Phys. Res. B 106, 227 (1995).
4. D. J. Eaglesham, P. A. Stolk, H.-J. Gossmann, and J. M. Poate, Appl. Phys. Lett. 65, 2305 (1994).
5. N. E. B. Cowern, G. F. A. Van de Walle, P. C. Zalm, and D. W. E. Vandenhoudt, Appl. Phys. Lett. 65, 2981 (1994).
6. S. Takeda, Jpn. J. Appl. Phys. 30, L639 (1991).
7. T. E. Haynes, D. J. Eaglesham, P. A. Stolk, H.-J. Gossmann, D. C. Jacobson, and J. M. Poate, Appl. Phys. Lett. 69, 1376 (1996).
8. S. H. Chao, P. B. Griffin, J. D. Plummer, and C. S. Rafferty, Appl. Phys. Lett. 69, 2113 (1996).
9. L. H. Zhang, K. S. Jones, P. H. Chi, and D. S. Simons, Appl. Phys. Lett. 67, 2025 (1995).
10. K. S. Jones, S. Prussin, and E. R. Weber, Appl. Phys. A 45, 1 (1988).
11. M. C. Ozturk, J. J. Wortman, C. M. Osburn, A. Ajmera, G. A. Rozgonyi, E. Frey, W.-K. Chu, and C. Lee, IEEE Trans. Electron Devices 35, 659 (1988).
12. B. de Mauduit, L. Laanab, C. Bergaud, M. M. Paye, J. Martinez, and A. Claverie, Nucl. Instrum. Methods Phys. Res. B 84, 190 (1994).
13. S. Prussin, D. I. Margolese, and R. N. Tauber, J. Appl. Phys. 54, 2316 (1983).
14. S. Chandhry, J. Liu, K. S. Jones, and M. E. Law, Solid-State Electron. 38, 1313 (1995).
15. G. Z. Pan, K. N. Tu, and S. Prussin, J. Appl. Phys. 81, 78 (1997).
16. D. K. Sadana, J. Washburn, and G. R. Booker, Philos. Mag. B 46, 11 (1982).
17. K. S. Jones and S. Prussin, Materials Issues in Silicon Integrated Circuit Processing, Proceedings of the Materials Research Society, edited by M. Strathman, J. Stimmel, and M. Wittmer (Materials Research Society, Pittsburgh, 1986), Vol. 71.
18. J. K. Patel and C. B. Read, "Statistics: Text Books and Monographs," in Handbook of the Normal Distribution (Marcel Dekker, New York, 1982), Vol. 40, pp. 19-40.