Study on optical reflection property from multilayer on Si substrate including nanoparticles in SiO2 layer

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 615-619

  Tsuji, H ^a   Arai, N ^b   Motono, M ^a   Gotoh, Y ^a   Adachi, K ^b   Kotaki, H ^b   Ishikawa, J ^a  

^a KYOTO UNIVERSITY   (Japan)

^b SHARP CORPORATION   (Japan)

Author keywords

Monitoring; Multi layer; Nanoparticle; Negative ion implantation; Optical reflection

Indexed keywords

ELECTRON DEVICES; ION IMPLANTATION; MULTILAYERS; NANOSTRUCTURED MATERIALS; SILVER;

DEPTH DISTRIBUTION;

SILICA;

EID: 0038751671     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00795-X     Document Type: Conference Paper

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