Tunable thin-film filters based on thermo-optic semiconductor films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4833, Issue , 2002, Pages 685-695

  Domash, Lawrence H ^a   Ma, Eugene ^a   Nemchuk, Nikolay ^a   Payne, Adam ^a   Wu, Ming ^a  

^a Aegis Semiconductor Inc   (United States)

Author keywords

Thermo optic; Thin films; Tunable filters; WDM

Indexed keywords

BANDPASS FILTERS; ELECTROMAGNETIC DISPERSION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSILICON; SOLAR CELLS; WAVELENGTH DIVISION MULTIPLEXING;

TUNABLE FILTERS;

SEMICONDUCTING FILMS;

EID: 0038723555     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.474383     Document Type: Conference Paper

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