Studies of a magnetic null discharge plasma for sputtering application

Surface and Coatings Technology

Volumn 171, Issue 1-3, 2003, Pages 178-182

  Sung, Youl Moon ^a   Otsubo, Masahisa ^a   Honda, Chikahisa ^a  

^a UNIVERSITY OF MIYAZAKI   (Japan)

Author keywords

Electron heating; Magnetic null field; Neutral loop discharge plasma; Sputtering

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRONS; MAGNETIC FIELD EFFECTS; MAGNETIC FLUX; MAGNETS; SPUTTERING;

NEUTRAL LOOP DISCHARGE (NLD);

PLASMAS;

PLASMA TREATMENT; SPUTTERING;

EID: 0038721127     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00266-4     Document Type: Article

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