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Volumn 82, Issue 22, 2003, Pages 3892-3894
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GaAs film on Si substrate transplanted from GaAs/Ge structure by direct bonding
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL BONDS;
EPITAXIAL GROWTH;
RESIDUAL STRESSES;
SCANNING ELECTRON MICROSCOPY;
SILICON;
SUBSTRATES;
THERMAL STRESS;
TRANSMISSION ELECTRON MICROSCOPY;
COVALENT BONDS;
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 0038646296
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1581976 Document Type: Article |
Times cited : (17)
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References (15)
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