Series resistance estimation and C(V) measurements on ultra thin oxide MOS capacitors

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2003, Pages 191-196

  Rideau, D ^a   Scheer, P ^a   Roy, D ^a   Gouget, G ^a   Minondo, M ^a   Juge, A ^a  

^a STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; ELECTRIC RESISTANCE; GATES (TRANSISTOR); LEAKAGE CURRENTS; SILICON COMPOUNDS;

GATE VOLTAGE;

MOS CAPACITORS;

EID: 0038642453     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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