Excimer laser annealing of NiTi shape memory alloy thin film

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4830, Issue , 2002, Pages 403-407

  Xie, Qiong ^a   Huang, Weimin ^b   Hong, Minghui ^a   Song, Wendong ^a   Chong, Tow Chong ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Eximer laser annealing; Local laser annealing; Shape memory alloy; TiNi

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; BIOCOMPATIBILITY; DIFFERENTIAL SCANNING CALORIMETRY; EXCIMER LASERS; FIELD EMISSION MICROSCOPES; NICKEL COMPOUNDS; PHASE TRANSITIONS; SCANNING ELECTRON MICROSCOPY; SHAPE MEMORY EFFECT; SILICON WAFERS; SPUTTERING;

LOCAL LASER ANNEALING;

THIN FILMS;

EID: 0038636288     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.486531     Document Type: Conference Paper

References (13)

1. L.C.Changand, and T.A.Read, Trans.AIME, Vol.191, (1951) 47.
2. Y.F.LU, X.Y.Chen, Z.M.Ren, S.Zhi, J.P.Wang and T. Y.F.Liew, "Pulsed Laser Deposition of TiNi Films at Various Temperatures", Jpn. J. Appl. Phys. Vol. 40 (2001) 5329.
3. Y.Q.Fu, W.M.Huang, H.J.Du, X.Huang, J.Tan and X.Y. Gao: "Characterization of TiNi shape-memory alloy thin films for MEMS applications", Surface & Coatings Technology, Vol. 145, Issue 1-3, (2001) 107.
4. P.Surbled, B.Le.Pioufle, E.H.Yang and H.Fujita: "Shape memory alloys for micromembranes actuation", SPIE, 3825, 1999, pp.63.
5. Y.Bellouard, T.Lehnert, J.E.Bidaux, T.Sidler, R. Clavel and R.Gotthardt: "Local annealing of complex mechanical devices: a new approach for developing monolithic macro-devices", Materials science and engineering A273-275, (1999) 795.
6. Chen, Peter; Jyh-Ming Ting: "Characteristics of TiNi alloy thin films", Thin Solid Films, Vol. 398-399, (2001) 597.
7. F.Villermaux, M.Tabrizian, L'H.Yahia, M.Meunier and D.L.Piron: "Excimer laser treatment of NiTi shape memory alloy biomaterials", Applied surface science 109/110 (1997) 62.
8. W.M.Huang, J.P.Tang, Q.Y.liu, X.Y.Gao, J.H,Miao, J. M., L.M.He and B.A.K. Ngoi: "Si-NiTi Shape Memory Alloy Tweezers", Proc. of the International MEMS Workshop 2001, Nanjin, 2001, pp.603.
9. Y.Bellouard, T.Lehnert, R.Clavel, T.Sidler and R. Gotthardt: "Laser annealing of shape memory alloys: A versatile tool for developing smart microdevices", J. Phys. IV France 11 (2001) Pr8-571.
10. L.S.Chen, K.L.Bo, HaroldKahn, S.M.Phillips and H.Heuer: "A Robust Co-Sputtering Fabrication Procedure for TiNi Shape Memory Alloys for MEMS", IEEE Journal Microelectromechanical Systems, VOL.10, NO.1, (2001) 69
11. N.yaakoubi, C.serre, S.martnez and A.perezrodrigued, J.R.Morante: "Growth and characterization of shape memor alloy thin films for Si Microactuator technologies", Journal of materials science: materials in electronics 12 (2001) 323.
12. H.D. Cu, K.M.Leung, C.Y.Chung, L.You, X.D.Han, K.S.Chan and J.K.L.Lai: "Pulsed laser deposition of NiTi shape memory alloy thin films with optimum parameters ", Thin Solid Films 330 (1998) 196.
13. Patrick Surbled, Catherine Clerc, Bruno Le Pioufle, Manabu Ataka and Hiroyuki Fujita: "Effect of the composition and thermal annealing on the transformation temperatures of sputtered TiNi shape memory alloy thin films, Thin Solid Films 401 (2001) 52.