Shape memory alloys for micromembrane actuation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3825, Issue , 1999, Pages 63-70

  Surbled, Patrick ^a   Le Pioufle, Bruno ^a   Yang, E H ^a   Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Microactuator; Micromachining; Micromembrane; Microsystems; Shape Memory Alloy

Indexed keywords

ACTUATORS; BIOCOMPATIBILITY; MECHANICAL ACTUATORS; MEDICAL APPLICATIONS; MICROACTUATORS; MICROELECTRONICS; MICROMACHINING; MICROSYSTEMS; THIN FILMS;

ANNEALING TREATMENTS; APPLICATION FIELDS; BIOMEDICAL APPLICATIONS; FABRICATION PROCESS; INTEGRATION PROCESS; MEMBRANE THICKNESS; MICROMEMBRANES; SILICON PROCESS TECHNOLOGY;

SHAPE MEMORY EFFECT;

EID: 0038260892     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.364304     Document Type: Conference Paper

References (22)

1. J. Ryhänen, M. Kallioinen, J. Tuukkanen, J. Junila, E. Niemelä, P. Sandvik, W. Serlo, "In vivo biocompatibility evaluation of nickel-titanium shape memory metal alloy: muscle and perineural tissue responses and encapsule membrane thickness", J. Biomed. Mater. Res., 41, pp. 481-488,1998
2. J. Peirs, D. Reynaerts, H. Van Brussel, "Development of shape memory micro actuators for medical applications", Proc. 4th international conference on new actuators (Actuator 94), pp. 381-385, Bremen, Germany, 1994
3. A. Olander, "An electrochemical investigation of solid cadmium-gold alloys, J. Am. Chem. Soc, 54, pp. 3819-3833, 1932
4. C. M. Wayman, J.D. Harrison, J.O.M., 41, pp. 26-, 1989
5. J. A. Walker, K. J. Gabriel, M Mehregany, "Thin-film Processing of TiNi Shape Memory Alloy", Sensors and Actuators, A21-A23, pp.243-246, 1990
6. J. D. Busch, A. D. Johnson, C. H. Lee, D. A. Stevenson, "Shape-memory properties in Ni-Ti sputter-deposited film", J. Appl. Phys., 68, 12, pp. 6224-6228, 1990
7. K. Ikuta, H. Fujita, M. Ikeda, S. Yamashita, "Crystallographic analysis of TiNi shape memory alloy thin film for microactuator", IEEE International Micro-Electro-Mechanical Systems, pp. 38-41, 1990
8. D. S. Grummon, L. Chang, "Effect of Concurrent Ion Bombardement on Structure and Composition of Ion Sputter-Deposited Ni-Ti Thin Films", Mat. Res. Soc. Symp. Proc, 268, pp. 167-172, 1992
9. A. Ishida, A. Takei, S. Miyazaki, "Shape memory thin film of Ti-Ni formed by sputtering", Thin Solid films, 228, pp. 210-214,1993
10. S. Miyazaki, K. Nomura, "Development of perfect shape memory effect in sputter-deposited TiNi thin films", IEEE International Micro-Electro-Mechanical Systems, pp. 176-181, 1994
11. L. Buchaillot, Y. Nakamura, S. Nakamura, H. Fujita, S. Miyazaki, "Thin film SMA actuators for MEMS applications", Mecatronics'96,2, pp. 627-630, Besançon, France, 1996
12. Y. Nakamura, S. Nakamura, L. Buchaillot, H. Fujita, "A three-dimensional shape memory alloy loop actuator", IEEE International Micro-Electro-Mechanical Systems, pp. 262-266,1997
13. K. Ikuta, M. Hayashi, T. Matsuura, "Shape Memory Alloy thin film fabricated by laser ablation" IEEE International Micro-Electro-Mechanical Systems, pp. 355-360, 1994
14. K. Tsuchiya, S. T. Davies, "Fabrication of TiNi shape memory alloy microactuators by ion beam sputter deposition", Nanotechnology, 9, pp. 67-71,1998
15. E. Makino, T. Mitsuya, T. Nakatsuji, T. Shibata, "Patterning and bonding of TiNi shape memory thin film for fabrication of micropump", Symposium on Design, Test and Microfabrication of MEMS/MOEMS, SPIE, Paris, France, pp. 1030-1037,1999
16. R.H. Wolf, A. H. Heuer, "TiNi (Shape Memory) Films on Silicon for MEMS Applications", J. Microelectromech. Syst., 4, 4, pp. 206-212, 1995
17. P. W. Barth, "Silicon microvalves for gas flow control", 8th Conference on Solid-State Sensors and Actuators, Transducers, Stockholm, Sweden, 2, pp. 276-279, 1995
18. P. Krulevitch, A.P. Lee, P.B. Ramsey, J. C. Trevino, J. Hamilton, M. A. Northrup, "Thin Film Shape Memory Alloy Microactuators", J. Microelectromech. Syst., 5, 4, pp. 270-281, 1996
19. A. Ishida, A. Takei, S. Miyazaki, "Shape memory thin film of Ti-Ni formed by sputtering", Thin Solid Films, 228, pp. 210-214, 1993
20. I. Neshev, R. G. Vichev, S. Tzanev, S. S. Todorov, "Sputtering of NiTi alloys: a comparison of experiment and simulation", Vacuum, 44, pp. 209-212, 1993
21. A. P. Jardine, J. S. Madsen, P. Mercado, "Characterization of the Deposition and Materials Parameters of Thin-Film TiNi for Microactuators and Smart Materials", Materials characterization, 32, pp. 169-178,1994
22. C. Gorecki, F. Chollet, E. Bonnotte, H. Kawakatsu, "Silicon Based Integrated Interferometer With Phase Modulation Driven by Acoustic Surfaces Waves", Opt. Lett., 22, 23, pp. 1784-1786,1997