The influence of in situ photoexcitation on a defect structure generation in Ar+ implanted GaAs(001) crystals revealed by high-resolution x-ray diffraction and Rutherford backscattering spectroscopy

Journal of Physics D: Applied Physics

Volumn 36, Issue 10 A, 2003, Pages

  Chtcherbatchev, K D ^a   Bublik, V T ^a   Markevich, A S ^b   Mordkovich, V N ^b   Alves, E ^c   Barradas, N P ^c   Sequeira, A D ^c  

^a N N BLOKHIN NATIONAL MEDICAL RESEARCH CENTER OF ONCOLOGY   (Russian Federation)

^b INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^c INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; ARGON; GALLIUM COMPOUNDS; ION BEAMS; ION IMPLANTATION; POINT DEFECTS; POSITIVE IONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON WAFERS; X RAY DIFFRACTION ANALYSIS;

GALLIUM ARSENIDE CRYSTAL; HIGH-RESOLUTION X-RAY DIFFRACTION; ION CURRENT; PHOTOEXCITATION; RADIATION-INDUCED POINT DEFECT;

CRYSTAL STRUCTURE;

EID: 0038621871     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/10A/329     Document Type: Article

References (16)

1. Brown W L and Ourmazd A 1992 Mater. Res. Soc. Bull. 17 30
2. Vinetzkii V L and Kholodar' G A 1979 Semiconductor Radiation Physics (Kiev, Naukova Dumka) p 336 (in Russian)
3. Erokhin Yu N, Ital'yantzev A G and Mordkovich V N 1988 Tech. Phys. Lett. 14 835
4. Gärtner K and Uguzzoni A 1992 Nucl. Instrum. Methods B 67 189
5. Gärtner K 1997 Nucl. Instrum. Methods B 132 147
6. Lyndard J and Dan Vid Selsk K 1965 Mat. Fys. Medd. 34 14
7. Bonderup E et al 1972 Radiat. Effects 12 261
8. Chtcherbatchev K D and Bublik V T 1997 Inst. Phys. Conf. Ser. 160 187
9. Wie C R, Tombrello T A and Vreeland T 1986 J. Appl. Phys. 59 3743
10. Chtcherbatchev K D, Bublik V T and Kuripyatnik A V 2001 Surface investigation: x-ray, synchrotron and neutron techniques 10 74
11. Krivoglaz M A 1983 X-ray and Neutron Diffraction in Inideal Crystals (Kiev, Naukova Dumka) p 407 (in Russian)
12. Servidory M and Fabri R 1993 J. Phys. B: Appl. Phys. 26 A22
13. Goldberg R D et al 1995 Nucl. Instrum. Methods Phys. Res. B 106 216
14. Bowen K and Tanner B 1998 High Resolution X-ray Diffractometry and Topography (London: Taylor and Francis) p 253
15. Bublik V T et al 1999 Crystallogr. Rep. 44 1035
16. Pelaz L et al 1999 Appl. Phys. Lett. 73 1421